This project involves the development of nanofabrication techniques that achieve a spatial resolution of 10 nm and below. In one system, single-wall carbon nanotubes are combined with a scanning-probe microscope to oxidize anodically the surface of atomically flat titanium. In another, micromechanical devices with interferometric sensors are being designed and fabricated to control the separation of an electrode gap with angstrom precision. The goal is to use such techniques to study biomolecular activity in-situ.